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Plastic Laminated Microchannel Device

Technology Category: Microtechnology; Fabrication Methods

Description: A microchannel plastic laminated device is being developed to detect trace quantities of Cr and other heavy metals in ground water. The device consists entirely of plastic and ceramic modules, including polyimide and Polycarbonate laminates, micropumps, and reservoirs. By using plastic laminates, a complete analytical system with no need for external micropumps or reservoirs (although the electronics and power source are external) can be fabricated. The module laminates, except the reservoirs/inlet, pumps, and detector, are laser machined in 100-µm-thick polymide using a 245-nm excimer laser micromachining system. From top to bottom, the following functional sections are laminated on top of each other:

  • two reservoirs and inlets
  • two micropumps (purchased from IMIT in Germany)
  • a mixing module
  • a reaction module
  • a detector module
  • a detector channel and outlet
Plastic Laminated Metal Sensor - side view. The approximate size is 4 cm x 4 cm x 2.75 cm. The laminated sensor section is only 0.2-cm thick.
Plastic Laminated Metal Sensor - side view. The approximate size is 4 cm x 4 cm x 2.75 cm. The laminated sensor section is only 0.2-cm thick.
Plastic Laminated Microchannel Device
(4 cm x 4 cm x 2.75 cm tall)
Individual Modules
Inlet Module (1x) Inlet Module (1x)
  • Polycarbonate
  • 2 cm x 2 cm x 0.95 cm
  • Inlet ports for syringe reservoirs
Pump Module (2x) Pump Module (2x)
  • Commercially made by IMIT
  • Piezoelectric
  • 2 cm x 3.5 cm x 0.5 cm
  • Polycarbonate housing
Mixing Module (1x) Mixing Module (1x)
  • Laser-machined polyimide
  • 800-µm-wide x 100-µm-deep channel
  • 200-µm-wide spokes
  • 2 cm x 2 cm
Half of Reaction Module (2x) Half of Reaction Module (2x)
  • Laser-machined polyimide
  • Top half flipped &overlaid
  • 200-µm-wide x 100-µm-deep channel
  • 2 cm x 2 cm
Detector Module (1x) Detector Module (1x)
  • 0.16-cm thick BK7 substrate
  • Au leads
  • Ir, Ag, Au sensor coatings
  • Si3N4/Ta2O5 overcoat
  • 2 cm x 2.2 cm
Detector Channel Module (1x) Detector Channel Module (1x)
  • Laser-machined polyimide
  • 200-µm-wide x 100-µm-deep channel
  • 2 cm x 2 cm
  • Outlet port
Laminated Modules
(2 cm x 2.2 cm x 0.2 cm thick)
  1. Detector Channel
  2. Detector Module
  3. Reaction Module
  4. Mixing Module
Reaction, mixing, and detector modules, detector channel and exit port.
Reaction, mixing, and detector modules, detector channel and exit port.  Top View
Top View
Reaction, mixing, and detector modules, detector channel and exit port.  Bottom View.
Closeup Bottom View

Point of Contact: Peter M Martin (509) 375-2076